Invention Grant
- Patent Title: Controlled bottom junctions
-
Application No.: US16742528Application Date: 2020-01-14
-
Publication No.: US11538939B2Publication Date: 2022-12-27
- Inventor: Brent Anderson , Ruilong Xie , Juntao Li , Kangguo Cheng
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Samuel Waldbaum
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66

Abstract:
A method of forming a vertical transport field effect transistor (VTFET) is provided. The method includes forming one or more vertical fins on a substrate, wherein there is a fin transition region between each of the one or more vertical fins and the substrate. The method further includes forming a sidewall liner having a first thickness on each of the one or more vertical fins. The method further includes forming a sidewall spacer having a second thickness on each of the sidewall liner(s), wherein the first thickness of the sidewall liner and the second thickness of the sidewall spacer determines an offset distance from each of the one or more vertical fins. The method further includes forming a trench with an edge offset from each of the one or more vertical fins by the offset distance.
Public/Granted literature
- US20210217896A1 CONTROLLED BOTTOM JUNCTIONS Public/Granted day:2021-07-15
Information query
IPC分类: