- Patent Title: Method for manufacturing a resistive random access memory structure
-
Application No.: US17371376Application Date: 2021-07-09
-
Publication No.: US11538990B2Publication Date: 2022-12-27
- Inventor: Wen-Jen Wang , Chun-Hung Cheng , Chuan-Fu Wang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsinchu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, PC
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A method for forming a resistive random access memory structure. The resistive random access memory structure includes a bottom electrode; a variable resistance layer disposed on the bottom electrode; a top electrode disposed on the variable resistance layer; a protection layer surrounding the variable resistance layer, wherein a top surface of the protection layer and a top surface of the top electrode are coplanar; and an upper interconnect structure disposed on the top electrode, wherein the upper interconnect structure is electrically connected to the top electrode and directly contacts a sidewall of the protection layer.
Public/Granted literature
- US20210336133A1 METHOD FOR MANUFACTURING A RESISTIVE RANDOM ACCESS MEMORY STRUCTURE Public/Granted day:2021-10-28
Information query
IPC分类: