Invention Grant
- Patent Title: Substrate processing apparatus
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Application No.: US17041734Application Date: 2020-03-04
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Publication No.: US11541502B2Publication Date: 2023-01-03
- Inventor: Kuniaki Yamaguchi , Hiroshi Shimomoto , Soichi Isobe , Koji Maeda , Kenji Shinkai , Hidetatsu Isokawa , Dai Yoshinari , Masayuki Tamura , Haiyang Xu , Shun Ehara , Kentaro Asano
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2019-041015 20190306
- International Application: PCT/JP2020/009018 WO 20200304
- International Announcement: WO2020/179804 WO 20200910
- Main IPC: B24B49/00
- IPC: B24B49/00 ; B24B37/015 ; B24B53/00 ; B24B57/02 ; B24B53/017

Abstract:
A substrate processing apparatus includes a polishing section and a transport section. The polishing section has a first polishing unit, a second polishing unit, and a transport mechanism. The first polishing unit has a first polishing apparatus and a second polishing apparatus. The second polishing unit has a third polishing apparatus and a fourth polishing apparatus. Each of the first to fourth polishing apparatuses has a polishing table to which a polishing pad is mounted, a top ring, and auxiliary units that perform a process on the polishing pad during polishing. Around the polishing table, a pair of auxiliary unit mounting units for mounting the respective auxiliary units in a left-right switchable manner with respect to a straight line connecting a swing center of the top ring and a center of rotation of the polishing table is provided at respective positions symmetrical with respect to the straight line.
Public/Granted literature
- US20210394332A1 SUBSTRATE PROCESSING APPARATUS Public/Granted day:2021-12-23
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