Invention Grant
- Patent Title: Developer critical dimension control with pulse development
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Application No.: US16691731Application Date: 2019-11-22
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Publication No.: US11543793B2Publication Date: 2023-01-03
- Inventor: Richard C. Johnson , Hao Tang , Yongan Xu
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Abdy Raissinia
- Main IPC: G05B19/402
- IPC: G05B19/402 ; G03F7/30 ; G03F7/20 ; B05D1/00

Abstract:
Embodiments of the invention include methods and structures for controlling developer critical dimension (DCD) variations across a wafer surface. Aspects of the invention include an apparatus having developer tubing and an internal cam. The internal cam is coupled to a fixed axis. A flexible divider is positioned between the developer tubing and the internal cam. The flexible divider is coupled to the internal cam such that rotation of the internal cam about the fixed axis is operable to change an inner diameter of the developer tubing.
Public/Granted literature
- US20200089188A1 DEVELOPER CRITICAL DIMENSION CONTROL WITH PULSE DEVELOPMENT Public/Granted day:2020-03-19
Information query
IPC分类: