Invention Grant
- Patent Title: Ceramic substrate and susceptor
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Application No.: US17041905Application Date: 2019-03-28
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Publication No.: US11551962B2Publication Date: 2023-01-10
- Inventor: Mamoru Kosakai , Nobuhiro Hidaka , Naoto Kimura , Hironori Kugimoto
- Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Merchant & Gould P.C.
- Priority: JPJP2018-066504 20180330
- International Application: PCT/JP2019/013652 WO 20190328
- International Announcement: WO2019/189600 WO 20191003
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C04B35/117 ; H02N13/00
Abstract:
A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.
Public/Granted literature
- US20210013081A1 CERAMIC SUBSTRATE AND SUSCEPTOR Public/Granted day:2021-01-14
Information query
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