Invention Grant
- Patent Title: Flash memory cell and forming method thereof
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Application No.: US17198268Application Date: 2021-03-11
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Publication No.: US11552088B2Publication Date: 2023-01-10
- Inventor: Chia-Min Hung , Ping-Chia Shih , Che-Hao Kuo , Kuei-Ya Chuang , Ssu-Yin Liu , Po-Hsien Chen , Wan-Chun Liao
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: H01L27/11521
- IPC: H01L27/11521 ; H01L29/423 ; H01L29/66 ; H01L21/28 ; H01L29/788

Abstract:
A method of forming a flash memory cell includes the following steps. A first dielectric layer and a floating gate layer are deposited on a substrate sequentially. Three blocking structures having oblique sidewalls broaden from bottom to top penetrating through the first dielectric layer and the floating gate layer are formed. A first part and a second part of the floating gate layer between two adjacent blocking structures are etched respectively, so that a first floating gate having two sharp top corners and oblique sidewalls, and a second floating gate having two sharp top corners and oblique sidewalls, are formed. The three blocking structures are removed. A first isolating layer and a first selective gate covering the first floating gate are formed and a second isolating layer and a second selective gate covering the second floating gate are formed. A flash memory cell formed by said method is also provided.
Public/Granted literature
- US20220293615A1 FLASH MEMORY CELL AND FORMING METHOD THEREOF Public/Granted day:2022-09-15
Information query
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