Invention Grant
- Patent Title: Method of coating a flexible substrate in a R2R deposition system, and vapor deposition system
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Application No.: US16985063Application Date: 2020-08-04
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Publication No.: US11552283B2Publication Date: 2023-01-10
- Inventor: Andreas Sauer , Thomas Deppisch , Mathew Dean Allison
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01M4/04
- IPC: H01M4/04 ; C23C16/54 ; C23C16/56 ; B05D1/00 ; B05D1/32 ; C23C14/04 ; C23C14/24 ; C23C14/56 ; C23C14/54

Abstract:
A method of coating a flexible substrate in a roll-to-roll deposition system is described. The method includes unwinding the flexible substrate from an unwinding roll, the flexible substrate having a first coating on a first main side thereof; measuring a lateral positioning of the first coating while guiding the flexible substrate to a coating drum; adjusting a lateral position of the flexible substrate on the coating drum depending on the measured lateral positioning of the first coating; and depositing a second coating on the flexible substrate, particularly on a second main side of the flexible substrate opposite the first main side. Further described is a vacuum deposition apparatus for conducting the methods described herein.
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