Invention Grant
- Patent Title: Learning method, management device, and management program
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Application No.: US16857384Application Date: 2020-04-24
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Publication No.: US11556853B2Publication Date: 2023-01-17
- Inventor: Yuki Kataoka , Takehito Watanabe
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Weihrouch IP
- Priority: JPJP2019-086216 20190426
- Main IPC: G06N20/00
- IPC: G06N20/00 ; G01J3/443 ; H01J37/32 ; H01L21/67 ; G01J3/28 ; G06N3/12

Abstract:
There is provided a learning method. The method includes performing preprocessing on light emission data in a chamber of a plasma processing apparatus, setting a constraint for generating a regression equation representing a relationship between an etching rate of the plasma processing apparatus and the light emission data, selecting a learning target wavelength from the light emission data subjected to the preprocessing, and receiving selection of other sensor data different from the light emission data. The method further includes generating a regression equation based on the set constraint while using, as learning data, the selected wavelength, the received other sensor data, and the etching rate, and outputting the generated regression equation.
Public/Granted literature
- US20200342357A1 LEARNING METHOD, MANAGEMENT DEVICE, AND MANAGEMENT PROGRAM Public/Granted day:2020-10-29
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