Invention Grant
- Patent Title: Transistors, memory arrays, and methods used in forming an array of memory cells individually comprising a transistor
-
Application No.: US16855446Application Date: 2020-04-22
-
Publication No.: US11557591B2Publication Date: 2023-01-17
- Inventor: Marcello Mariani , Giorgio Servalli
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P. S.
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/66 ; H01L21/308 ; H01L21/02 ; H01L21/306 ; H01L29/78

Abstract:
A method used in forming an array of memory cells comprises forming lines of top-source/drain-region material, bottom-source/drain-region material, and channel-region material vertically there-between in rows in a first direction. The lines are spaced from one another in a second direction. The top-source/drain-region material, bottom-source/drain-region material, and channel-region material have respective opposing sides. The channel-region material on its opposing sides is laterally recessed in the second direction relative to the top-source/drain-region material and the bottom-source/drain-region material on their opposing sides to form a pair of lateral recesses in the opposing sides of the channel-region material in individual of the rows. After the pair of lateral recesses are formed, the lines of the top-source/drain-region material, the channel-region material, and the bottom-source/drain-region material are patterned in the second direction to comprise pillars of individual transistors. Rows of wordlines are formed in the first direction that individually are operatively aside the channel-region material of individual of the pillars in the pairs of lateral recesses and that interconnect the transistors in that individual row. Other embodiments, including structure independent of method, are disclosed.
Public/Granted literature
Information query
IPC分类: