- Patent Title: Negative photosensitive resin composition, cured film, element provided with cured film, organic EL display provided with cured film, and method for producing same
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Application No.: US16495745Application Date: 2018-03-27
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Publication No.: US11561470B2Publication Date: 2023-01-24
- Inventor: Yugo Tanigaki , Kazuto Miyoshi
- Applicant: TORAY INDUSTRIES, INC.
- Applicant Address: JP Tokyo
- Assignee: TORAY INDUSTRIES, INC.
- Current Assignee: TORAY INDUSTRIES, INC.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JPJP2017-064524 20170329,JPJP2017-241099 20171215
- International Application: PCT/JP2018/012431 WO 20180327
- International Announcement: WO2018/181311 WO 20181004
- Main IPC: G03F7/037
- IPC: G03F7/037 ; G03F7/038 ; G03F7/40 ; G03F7/075 ; H01L51/56 ; G02F1/1339 ; G03F7/16 ; G03F7/20 ; G03F7/32

Abstract:
The invention aims to provide a cured film that is high in sensitivity, able to form a pattern having a small-tapered shape after a development step and after a heat curing step, helpful to depress the difference in the width of patterned openings between before and after the heat curing step, and high in light-shielding capability and also aims to provide a negative type photosensitive resin composition that serves for the production thereof. The negative type photosensitive resin composition includes an alkali-soluble resin (A), a radical polymerizable compound (B), a photo initiator (C1), and a black colorant (Da); the alkali-soluble resin (A) including a first resin (A1) containing one or more selected from the group consisting of polyimide (A1-1), polyimide precursor (A1-2), polybenzoxazole (A1-3), polybenzoxazole precursor (A1-4), and polysiloxane (A1-5); and the radical polymerizable compound (B) including one or more selected from the group consisting of a fluorene backbone-containing radical polymerizable compound (B1) and an indane backbone-containing radical polymerizable compound (B2).
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