Invention Grant
- Patent Title: Parameter estimation for metrology of features in an image
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Application No.: US16667506Application Date: 2019-10-29
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Publication No.: US11569056B2Publication Date: 2023-01-31
- Inventor: Brad Larson , John Flanagan , Maurice Peemen
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: H01J37/22
- IPC: H01J37/22 ; G06T7/00 ; H01J37/28 ; G01N21/956 ; H04N19/149

Abstract:
Methods and apparatuses are disclosed herein for parameter estimation for metrology. An example method at least includes optimizing, using a parameter estimation network, a parameter set to fit a feature in an image based on one or more models of the feature, the parameter set defining the one or more models, and providing metrology data of the feature in the image based on the optimized parameter set.
Public/Granted literature
- US20200161083A1 PARAMETER ESTIMATION FOR METROLOGY OF FEATURES IN AN IMAGE Public/Granted day:2020-05-21
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