Invention Grant
- Patent Title: Anti-reflective coating
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Application No.: US16790017Application Date: 2020-02-13
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Publication No.: US11572476B2Publication Date: 2023-02-07
- Inventor: Deyan Wang , Sheng Liu
- Applicant: Rohm and Haas Electronic Materials LLC
- Applicant Address: US MA Marlborough
- Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee Address: US MA Marlborough
- Agent Shaorong Chen
- Main IPC: C04B16/08
- IPC: C04B16/08 ; C08K7/22 ; C08F2/46 ; C08F2/50 ; C08G61/04 ; C09D5/00 ; C08K7/26 ; C08L83/04 ; C08L47/00 ; C08G18/73 ; C08G18/76 ; C08G77/385 ; C08K5/1515 ; C08K5/095 ; C08F220/18 ; C08K5/05 ; C08K5/06 ; C08K5/07 ; C08K3/36

Abstract:
There is provided a curable composition for forming an anti-reflective film. The composition includes: (a) hollow silica nanoparticles; (b) a siloxane binder having reactive groups; (c) at least one additional material having reactive groups; (d) an initiator; and (e) solvent. The siloxane binder is present in an amount that is at least 50% by weight of the total weight of (siloxane binder+additional materials having reactive groups). The weight ratio of hollow silica nanoparticles to the total of (siloxane binder+additional materials having reactive groups) is no greater than 1.75 to 1.
Public/Granted literature
- US20200263041A1 ANTI-REFLECTIVE COATING Public/Granted day:2020-08-20
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