Invention Grant
- Patent Title: MEMS structure and method for detecting a change in a parameter
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Application No.: US16406752Application Date: 2019-05-08
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Publication No.: US11573131B2Publication Date: 2023-02-07
- Inventor: Reinhard Hainisch , Thomas Grille
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Banner & Witcoff Ltd.
- Priority: DE102018207319.8 20180509
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01K5/48 ; G01K5/54

Abstract:
A MEMS structure including a latch, a first lever, and a second lever. The first lever is designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place. The second lever is designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction.
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