Invention Grant
- Patent Title: Controller and control techniques for linear accelerator and ion implanter having linear accelerator
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Application No.: US16828899Application Date: 2020-03-24
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Publication No.: US11576252B2Publication Date: 2023-02-07
- Inventor: Keith E. Kowal
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDB Firm PLLC
- Main IPC: H05H7/02
- IPC: H05H7/02 ; H05H7/22 ; H01J37/08 ; H03L7/081 ; H01J37/317 ; H03K5/1536

Abstract:
An apparatus may include global control module, the global control module including a digital master clock generator and a master waveform generator. The apparatus may also include a plurality of resonator control modules, coupled to the global control module. A given resonator control module of the plurality of resonator control modules may include a synchronization module, having a first input coupled to receive a resonator output voltage pickup signal from a local resonator, a second input coupled to receive a digital master clock signal from the digital master clock generator, and a first output coupled to send a delay signal to the master waveform generator.
Public/Granted literature
- US20210307152A1 CONTROLLER AND CONTROL TECHNIQUES FOR LINEAR ACCELERATOR AND ION IMPLANTER HAVING LINEAR ACCELARATOR Public/Granted day:2021-09-30
Information query
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