Invention Grant
- Patent Title: Joint nanoscale three-dimensional imaging and chemical analysis
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Application No.: US17057961Application Date: 2019-05-31
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Publication No.: US11598734B2Publication Date: 2023-03-07
- Inventor: Tom Wirtz , Florian Vollnhals
- Applicant: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Applicant Address: LU Esch-sur-Alzette
- Assignee: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Current Assignee: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Current Assignee Address: LU Esch-sur-Alzette
- Agency: Rankin, Hill & Clark LLP
- Priority: LU100806 20180530
- International Application: PCT/EP2019/064177 WO 20190531
- International Announcement: WO2019/229233 WO 20191205
- Main IPC: G01N23/225
- IPC: G01N23/225 ; G01N23/2251 ; G01N23/2258 ; H01J49/00
Abstract:
A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample, which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.
Public/Granted literature
- US20210302338A1 JOINT NANOSCALE THREE-DIMENSIONAL IMAGING AND CHEMICAL ANALYSIS Public/Granted day:2021-09-30
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