Invention Grant
- Patent Title: Replaceable end effector contact pads, end effectors, and maintenance methods
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Application No.: US16798997Application Date: 2020-02-24
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Publication No.: US11600580B2Publication Date: 2023-03-07
- Inventor: Whitney Kroetz , Damon Keith Cox , Leon Volfovski , Jeffrey C. Hudgens , Balamurali Murugaraj
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Priority: IN201941007622 20190227
- Main IPC: H01L23/66
- IPC: H01L23/66 ; H01L23/00 ; H01L21/687 ; H01L21/67

Abstract:
Replaceable contact pads of end effectors are provided. The contact pads support substrates in electronic device manufacturing. The contact pad includes a contact pad head having a contact surface configured to contact a substrate, a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end, and a circular securing member received around the shaft and seated in the shaft indent and configured to secure the contact pad to the end effector body. End effectors including replaceable contact pads and maintenance methods are described, as are additional aspects.
Public/Granted literature
- US20200273826A1 REPLACEABLE END EFFECTOR CONTACT PADS, END EFFECTORS, AND MAINTENANCE METHODS Public/Granted day:2020-08-27
Information query
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