公开(公告)号：US11600580B2

公开(公告)日：2023-03-07

申请号：US16798997

申请日：2020-02-24

Applicant: Applied Materials, Inc.

Inventor： Whitney Kroetz ,  Damon Keith Cox ,  Leon Volfovski ,  Jeffrey C. Hudgens ,  Balamurali Murugaraj

IPC: H01L23/66 ,  H01L23/00 ,  H01L21/687 ,  H01L21/67

Abstract: Replaceable contact pads of end effectors are provided. The contact pads support substrates in electronic device manufacturing. The contact pad includes a contact pad head having a contact surface configured to contact a substrate, a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end, and a circular securing member received around the shaft and seated in the shaft indent and configured to secure the contact pad to the end effector body. End effectors including replaceable contact pads and maintenance methods are described, as are additional aspects.

公开(公告)号：US20200273826A1

公开(公告)日：2020-08-27

申请号：US16798997

申请日：2020-02-24

Applicant: Applied Materials, Inc.

Inventor： Whitney Kroetz ,  Damon Keith Cox ,  Leon Volfovski ,  Jeffrey C. Hudgens ,  Balamurali Murugaraj

IPC: H01L23/66 ,  H01L23/00

Abstract: Replaceable contact pads of end effectors are provided. The contact pads support substrates in electronic device manufacturing. The contact pad includes a contact pad head having a contact surface configured to contact a substrate, a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end, and a circular securing member received around the shaft and seated in the shaft indent and configured to secure the contact pad to the end effector body. End effectors including replaceable contact pads and maintenance methods are described, as are additional aspects.