A data processing system, including a cyclic correlation establishing module, a data pattern establishing module, and a data pattern alignment module, is provided. The cyclic correlation establishing module receives a plurality of first sensor data, obtained from a first sensor operation performed on processing devices, and receives a table of processing steps and cyclic procedures. The cyclic correlation establishing module obtains a data correlation of the first sensor data according to the number of sample points in a data cycle of the first sensor data and the table to correct the first sensor data. The data pattern establishing module obtains a plurality of first data pattern features from the first sensor data. The data pattern alignment module aligns a plurality of second sensor data obtained from a second sensor operation performed on the processing devices with the first sensor data according to the first data pattern features.