Invention Grant
- Patent Title: Radical assist ignition plasma system and method
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Application No.: US16930193Application Date: 2020-07-15
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Publication No.: US11615970B2Publication Date: 2023-03-28
- Inventor: Hiroo Sekiguchi
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/027 ; H01L21/033 ; H01L21/311 ; H01J37/32
Abstract:
Plasma-assisted methods and apparatus are disclosed. The methods and apparatus can be used to provide activated species formed in a remote plasma unit to a reaction chamber to assist ignition of a plasma within a reaction chamber coupled to the remote plasma unit.
Public/Granted literature
- US20210020467A1 RADICAL ASSIST IGNITION PLASMA SYSTEM AND METHOD Public/Granted day:2021-01-21
Information query
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