Invention Grant
- Patent Title: Method for producing a nitride compound semiconductor component
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Application No.: US16955560Application Date: 2019-01-17
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Publication No.: US11616164B2Publication Date: 2023-03-28
- Inventor: Philipp Drechsel , Werner Bergbauer , Thomas Lehnhardt , Jürgen Off , Joachim Hertkorn
- Applicant: OSRAM OLED GmbH
- Applicant Address: DE Regensburg
- Assignee: OSRAM OLED GmbH
- Current Assignee: OSRAM OLED GmbH
- Current Assignee Address: DE Regensburg
- Agency: Slater Matsil, LLP
- Priority: DE102018101558.5 20180124
- International Application: PCT/EP2019/051154 WO 20190117
- International Announcement: WO2019/145216 WO 20190801
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/12

Abstract:
A method for producing a nitride compound semiconductor component is disclosed. In an embodiment the method includes providing a growth substrate, growing a nucleation layer of an aluminum-containing nitride compound semiconductor onto the growth substrate, growing a tension layer structure for generating a compressive stress, wherein the tension layer structure comprises at least a first GaN semiconductor layer and a second GaN semiconductor layer, and wherein an Al(Ga)N interlayer for generating the compressive stress is disposed between the first GaN semiconductor layer and the second GaN semiconductor layer and growing a functional semiconductor layer sequence of the nitride compound semiconductor component onto the tension layer structure, wherein a growth of the second GaN semiconductor layer is preceded by a growth of a first 3D AlGaN layer on the Al(Ga)N interlayer in such a way that it has nonplanar structures.
Public/Granted literature
- US20200335658A1 Method for Producing a Nitride Compound Semiconductor Component Public/Granted day:2020-10-22
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