Invention Grant
- Patent Title: Micromechanical sensor system, method for using a micromechanical sensor system
-
Application No.: US17236662Application Date: 2021-04-21
-
Publication No.: US11619647B2Publication Date: 2023-04-04
- Inventor: Johannes Classen
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102020205616.1 20200504
- Main IPC: G01P15/00
- IPC: G01P15/00 ; G01P15/125 ; G01P15/08

Abstract:
A micromechanical sensor system, in particular, an acceleration sensor, including a substrate having a main extension plane, the sensor system including a first mass and a second mass. The first and second masses are each designed to be at least partially movable in a vertical direction, perpendicular to the main extension plane of the substrate. The first mass includes a stop structure, wherein the stop structure has an overlap with the second mass in the vertical direction.
Public/Granted literature
- US20210341510A1 MICROMECHANICAL SENSOR SYSTEM, METHOD FOR USING A MICROMECHANICAL SENSOR SYSTEM Public/Granted day:2021-11-04
Information query