Invention Grant
- Patent Title: Apparatus including a clean mini environment
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Application No.: US16765453Application Date: 2018-11-26
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Publication No.: US11639811B2Publication Date: 2023-05-02
- Inventor: Bartholomeus Hans Louis Lindeboom , Juul Keijser
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- International Application: PCT/NL2018/050787 WO 20181126
- International Announcement: WO2019/103610 WO 20190531
- Main IPC: F24F13/08
- IPC: F24F13/08 ; F24F3/167

Abstract:
An apparatus (10), including a gas recirculation circuit comprising a mini environment chamber (14), a gas pump (16), a filter assembly (22) which are connected by a recirculation channel (20). The apparatus additionally includes an air supply conduit (18) for supplying air to the gas recirculation circuit and having an air supply conduit inlet (18a) which opens into the ambient air and an air supply conduit outlet (18b) which opens in the recirculation circuit. In use, a mini environment chamber pressure (Pme) is maintained higher than the ambient pressure (Pam). The gas recirculation channel (20) includes a substantially frictionless recirculation restriction embodied as a throat (30). At downstream end of the throat which forms the narrow part of the throat, in use, the static pressure is below the ambient pressure. The air supply conduit outlet opens at the downstream end (30a) of the throat.
Public/Granted literature
- US20200284467A1 APPARATUS INCLUDING A CLEAN MINI ENVIRONMENT Public/Granted day:2020-09-10
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