Invention Grant
- Patent Title: Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same
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Application No.: US17071149Application Date: 2020-10-15
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Publication No.: US11646205B2Publication Date: 2023-05-09
- Inventor: Rami Khazaka , Lucas Petersen Barbosa Lima , Giuseppe Alessio Verni , Qi Xie
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/306 ; H01L29/36 ; C23C16/52 ; H01L21/67
Abstract:
A method for selectively forming an n-type doped material on a surface of a substrate is disclosed. A system for performing the method and structures and devices formed using the method are also disclosed.
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