Invention Grant
- Patent Title: Pad conditioner cleaning system
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Application No.: US17849576Application Date: 2022-06-24
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Publication No.: US11648645B2Publication Date: 2023-05-16
- Inventor: Shantanu Rajiv Gadgil , Sumit Subhash Patankar , Nathan Arron Davis , Michael J. Coughlin , Allen L. D'Ambra
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- The original application number of the division: US16932628 2020.07.17
- Main IPC: B24B53/017
- IPC: B24B53/017
Abstract:
A method of cleaning a conditioner head includes bringing two clamps of a cleaning tool inward toward a disk-shaped pad conditioner head to press a sponge against an outer surface of the disk-shaped pad conditioner head, and creating relative motion between the cleaning tool and the pad conditioner head to wipe the sponge against the pad conditioner head.
Public/Granted literature
- US20220314397A1 PAD CONDITIONER CLEANING SYSTEM Public/Granted day:2022-10-06
Information query
