Invention Grant
- Patent Title: Microelectromechanical infrared sensing device and fabrication method thereof
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Application No.: US17729884Application Date: 2022-04-26
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Publication No.: US11656128B2Publication Date: 2023-05-23
- Inventor: Chin-Jou Kuo , Bor-Shiun Lee , Ming-Fa Chen
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Priority: TW 1102112 2022.01.19
- Main IPC: G01J5/20
- IPC: G01J5/20 ; B81B3/00 ; B81C1/00

Abstract:
A MEMS infrared sensing device includes a substrate and an infrared sensing element. The infrared sensing element is provided above the substrate and has a sensing area and an infrared absorbing area which do not overlap each other. The infrared sensing element includes two infrared absorbing structures, an infrared sensing layer provided between the two infrared absorbing structures, and an interdigitated electrode structure located in the sensing area. Each of the two infrared absorbing structures includes at least one infrared absorbing layer, and the two infrared absorbing structures are located in the sensing area and the infrared absorbing area. The infrared sensing layer is located in the sensing area and does not extend into the infrared absorbing area. The interdigitated electrode structure is in electrical contact with the infrared sensing layer.
Public/Granted literature
- US20230040320A1 MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2023-02-09
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