Invention Grant
- Patent Title: Erosion resistant metal oxide coatings
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Application No.: US16039005Application Date: 2018-07-18
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Publication No.: US11667575B2Publication Date: 2023-06-06
- Inventor: Xiaowei Wu , Jennifer Y. Sun , Michael R. Rice
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: C04B35/48
- IPC: C04B35/48 ; C04B35/505 ; C09D1/00 ; C23C16/455 ; C04B35/50 ; C07F7/00 ; C07F5/00

Abstract:
Embodiments of the present disclosure relate to articles, coated articles and methods of coating such articles with a rare earth metal containing oxide coating. The coating can contain at least a first metal (e.g., a rare earth metal, tantalum, zirconium, etc.) and a second metal that have been co-deposited onto a surface of the article. The coating can include a homogenous mixture of the first metal and the second metal and does not contain mechanical segregation between layers in the coating.
Public/Granted literature
- US20200024194A1 EROSION RESISTANT METAL OXIDE COATINGS Public/Granted day:2020-01-23
Information query
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