Invention Grant
- Patent Title: Y
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Application No.: US17232013Application Date: 2021-04-15
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Publication No.: US11667577B2Publication Date: 2023-06-06
- Inventor: Jennifer Y. Sun , David Fenwick
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- The original application number of the division: US16279247 2019.02.19
- Main IPC: C04B35/30
- IPC: C04B35/30 ; C04B35/505 ; C04B35/638 ; C04B35/622 ; H01J37/32 ; H01L21/67 ; H01L21/683 ; C04B35/645 ; H01L21/687 ; C23C30/00 ; C04B41/00
Abstract:
A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y2O3—ZrO2 powder consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2; and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of Y2O3—ZrO2, the sintered ceramic body consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.
Public/Granted literature
- US20210230070A1 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS Public/Granted day:2021-07-29
Information query
IPC分类:
