- Patent Title: Temperature measurement system and temperature measurement method
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Application No.: US17063816Application Date: 2020-10-06
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Publication No.: US11668608B2Publication Date: 2023-06-06
- Inventor: Tong Wu , Kenji Nagai
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP 2019184525 2019.10.07
- Main IPC: G01J3/427
- IPC: G01J3/427 ; G01K11/125 ; G01N21/41 ; G01K7/02 ; G01N21/71

Abstract:
A temperature measurement system configured to measure a temperature of a target object having a first main surface and a second main surface includes a light source unit configured to emit output light penetrating the target object and including a first wavelength range and a second wavelength range; a measurement unit configured to measure a spectrum of reflected light; an optical path length ratio calculator configured to calculate an optical path length ratio between the output light of the first wavelength range and the output light of the second wavelength range; and a temperature calculator configured to calculate the temperature of the target object based on the optical path length ratio and a previously investigated relationship between the temperature of the target object and a refractive index ratio between the output light of the first wavelength range and the output light of the second wavelength range.
Public/Granted literature
- US20210102847A1 TEMPERATURE MEASUREMENT SYSTEM AND TEMPERATURE MEASUREMENT METHOD Public/Granted day:2021-04-08
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