Invention Grant
- Patent Title: III-N transistors with local stressors for threshold voltage control
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Application No.: US16297837Application Date: 2019-03-11
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Publication No.: US11670709B2Publication Date: 2023-06-06
- Inventor: Sansaptak Dasgupta , Marko Radosavljevic , Han Wui Then , Nidhi Nidhi , Rahul Ramaswamy , Paul B. Fischer , Walid M. Hafez , Johann Christian Rode
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Akona IP
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/20 ; H01L29/205 ; H01L29/66 ; H01L29/08 ; H01L29/04 ; H01L29/423

Abstract:
Disclosed herein are IC structures, packages, and device assemblies with III-N transistors that include additional materials, referred to herein as “stressor materials,” which may be selectively provided over portions of polarization materials to locally increase or decrease the strain in the polarization material. Providing a compressive stressor material may decrease the tensile stress imposed by the polarization material on the underlying portion of the III-N semiconductor material, thereby decreasing the two-dimensional electron gas (2DEG) and increasing a threshold voltage of a transistor. On the other hand, providing a tensile stressor material may increase the tensile stress imposed by the polarization material, thereby increasing the 2DEG and decreasing the threshold voltage. Providing suitable stressor materials enables easier and more accurate control of threshold voltage compared to only relying on polarization material recess.
Public/Granted literature
- US20200295172A1 III-N transistors with local stressors for threshold voltage control Public/Granted day:2020-09-17
Information query
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