Invention Grant
- Patent Title: Coaxial contacts for 3D logic and memory
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Application No.: US17647294Application Date: 2022-01-06
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Publication No.: US11676968B2Publication Date: 2023-06-13
- Inventor: Lars Liebmann , Jeffrey Smith , Anton J. deVilliers , Kandabara Tapily
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- The original application number of the division: US16716901 2019.12.17
- Main IPC: H01L27/118
- IPC: H01L27/118 ; H01L23/522 ; H01L27/02 ; H01L21/768 ; H10B99/00 ; H10B10/00 ; H01L27/105 ; H01L27/11

Abstract:
In method for forming a semiconductor device, a first opening is formed in a dielectric stack that has a cylinder shape with a first sidewall. A first conductive layer is deposited along the first sidewall of the first opening and a first insulating layer is deposited along an inner sidewall of the first conductive layer. The dielectric stack is then etched along an inner sidewall of the first insulating layer so as to form a second opening that extends into the dielectric stack with a second sidewall. A second conductive layer is further formed along the second sidewall of the second opening and a second insulating layer is formed along an inner sidewall of the second conductive layer. A bottom of the second conductive layer is positioned below a bottom of the first conductive layer to form a staggered configuration.
Public/Granted literature
- US20220130864A1 COAXIAL CONTACTS FOR 3D LOGIC AND MEMORY Public/Granted day:2022-04-28
Information query
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