Invention Grant
- Patent Title: Sensor with dam structure and method for manufacturing the same
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Application No.: US17134543Application Date: 2020-12-28
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Publication No.: US11676983B2Publication Date: 2023-06-13
- Inventor: Chung-Chang Chang , Chang-Lun Lu , Ming-Hung Lin
- Applicant: Powertech Technology Inc.
- Applicant Address: TW Hsinchu County
- Assignee: Powertech Technology Inc.
- Current Assignee: Powertech Technology Inc.
- Current Assignee Address: TW Hsinchu County
- Agency: JCIPRNET
- Priority: TW 9142999 2020.12.07
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A sensor includes a first chip, a dam structure and a cover. The first chip includes a substrate, a sensing area and a low-k material layer. The sensing area is located on the surface of the substrate. The low-k material layer is located in the substrate. The dam structure is located on the first chip. The dam structure covers the edge of the low-k material layer. The cover is located on the dam structure and covers the sensing area. A manufacturing method of a sensor is also provided.
Public/Granted literature
- US20210210539A1 SENSOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2021-07-08
Information query
IPC分类: