Invention Grant
- Patent Title: Method for manufacturing a sensing device
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Application No.: US17545184Application Date: 2021-12-08
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Publication No.: US11677035B2Publication Date: 2023-06-13
- Inventor: Wei-Lin Wan , Yu-Tsung Liu , Ming-Chih Chen , Te-Yu Lee
- Applicant: InnoLux Corporation
- Applicant Address: TW Miao-Li County
- Assignee: INNOLUX CORPORATION
- Current Assignee: INNOLUX CORPORATION
- Current Assignee Address: TW Miao-Li County
- Agency: McClure, Qualey & Rodack, LLP
- Priority: CN 2110017770.7 2021.01.07
- Main IPC: H01L31/0216
- IPC: H01L31/0216 ; H01L31/18

Abstract:
A method for manufacturing a sensing device is provided. The method includes: providing a substrate; forming a sensing unit on the substrate; forming a first light-shielding layer on the sensing unit; forming a first anti-reflection layer on the sensing unit; and patterning the first light-shielding layer and the first anti-reflection layer using a single lithography process to form a first pinhole corresponding to the sensing unit.
Public/Granted literature
- US20220216351A1 METHOD FOR MANUFACTURING A SENSING DEVICE Public/Granted day:2022-07-07
Information query
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