Invention Grant
- Patent Title: Asymmetric deformable diffractive grating modulator
-
Application No.: US16985110Application Date: 2020-08-04
-
Publication No.: US11681155B2Publication Date: 2023-06-20
- Inventor: Glen Fitzpatrick , John Harley
- Applicant: Teledyne Micralyne Inc.
- Applicant Address: CA Edmonton
- Assignee: Teledyne Micralyne Inc.
- Current Assignee: Teledyne Micralyne Inc.
- Current Assignee Address: CA Alberta
- Agency: Rodman & Rodman LLP
- Agent Kirsten M. Oates
- Main IPC: G02B27/42
- IPC: G02B27/42 ; G02B26/08 ; G02B5/18

Abstract:
A micro-electromechanical structure for modulating light beams includes multiple asymmetric deformable diffractive elements, each having an L-shaped cross section, split pedestal and flexible reflective member. The reflective member has an elongated shape, and a supported part and unsupported part. The split pedestal extends along the long dimension of the supported part of the reflective member and is anchored to a substrate which supports one or more electrodes or serves as an electrode. The diffractive element is movable between a non-energized position wherein the diffractive element acts to reflect a beam of light as a planar mirror, to an energized position wherein upon application of an electrostatic force, the diffractive element flexes independently about an axis parallel to the long dimension of each reflective member to vary a curvature of the reflective member to form a blazed grating.
Public/Granted literature
- US20210041713A1 ASYMMETRIC DEFORMABLE DIFFRACTIVE GRATING MODULATOR Public/Granted day:2021-02-11
Information query