公开(公告)号：US11681155B2

公开(公告)日：2023-06-20

申请号：US16985110

申请日：2020-08-04

Applicant: Teledyne Micralyne Inc.

Inventor： Glen Fitzpatrick ,  John Harley

IPC: G02B27/42 ,  G02B26/08 ,  G02B5/18

CPC classification number: G02B27/4233 ,  G02B5/1828 ,  G02B26/0841 ,  B81B2201/047

Abstract: A micro-electromechanical structure for modulating light beams includes multiple asymmetric deformable diffractive elements, each having an L-shaped cross section, split pedestal and flexible reflective member. The reflective member has an elongated shape, and a supported part and unsupported part. The split pedestal extends along the long dimension of the supported part of the reflective member and is anchored to a substrate which supports one or more electrodes or serves as an electrode. The diffractive element is movable between a non-energized position wherein the diffractive element acts to reflect a beam of light as a planar mirror, to an energized position wherein upon application of an electrostatic force, the diffractive element flexes independently about an axis parallel to the long dimension of each reflective member to vary a curvature of the reflective member to form a blazed grating.

公开(公告)号：US20240053602A1

公开(公告)日：2024-02-15

申请号：US18494673

申请日：2023-10-25

Applicant: Teledyne Micralyne Inc.

Inventor： Glen Fitzpatrick ,  Mary Seto

IPC: G02B26/08 ,  G01S7/481 ,  G02B26/10

CPC classification number: G02B26/0841 ,  G01S7/4817 ,  G02B26/105

Abstract: MEMs-based variable blazed gratings are provided for passive or active phase modulation and beam control in LIDAR among other applications. A system and method for modulating light uses a microelectromechanical structure having deformable diffractive elements. The light is directed to the diffractive elements which act to reflect the light as planar mirrors. Applying a predetermined electrostatic force corresponding to each diffractive element flexes each diffractive element independently from other diffractive elements. Each diffractive element is either flexed continuously through a range of deflected positions or held stably at a single deflected position to interfere with the light through phase changes imparted according to the laws of diffraction.