Invention Grant
- Patent Title: Peak alignment for the wavelength calibration of a spectrometer
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Application No.: US17335814Application Date: 2021-06-01
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Publication No.: US11692874B2Publication Date: 2023-07-04
- Inventor: Yan Chen , Xinkang Tian
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01J3/18 ; G01J3/28

Abstract:
Aspects of the present disclosure provide a method for wavelength calibration of a spectrometer. The method can include receiving a calibration light signal having first spectral components of different first wavelengths; separating and projecting the first spectral components onto pixels of a detector of the spectrometer; establishing a relation between the first wavelengths and pixel numbers of first pixels on which the first spectral components are projected; calculating first residual errors between the first wavelengths and estimated wavelengths that are associated by the relation to the pixel numbers of the first pixels; receiving an optical signal having a second spectral component of a second wavelength; projecting the optical signal onto a second pixel; and calibrating the second wavelength based on a second residual error calculated based on one of the first residual errors that corresponds to a pair of the first pixels between which the second pixel is located.
Public/Granted literature
- US20220381612A1 PEAK ALIGNMENT FOR THE WAVELENGTH CALIBRATION OF A SPECTROMETER Public/Granted day:2022-12-01
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