Invention Grant
- Patent Title: Laser device and electronic device manufacturing method
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Application No.: US17665087Application Date: 2022-02-04
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Publication No.: US11695248B2Publication Date: 2023-07-04
- Inventor: Keisuke Ishida
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/134
- IPC: H01S3/134 ; H01S3/102 ; H01S3/094 ; H01S3/10

Abstract:
A laser device may include a laser resonator; a chamber arranged on an optical path of the laser resonator; a pair of electrodes arranged in the chamber; a power source applying a voltage to the electrodes; a storage unit storing a voltage value; and a control unit configured to set an application voltage value of the voltage applied to the electrodes as setting the application voltage value for outputting a pulse whose pulse number is equal to or larger than 1 and smaller than i based on the voltage command value and the voltage value stored in the storage unit, and setting the application voltage for outputting a pulse whose pulse number is equal to or larger than i and smaller than j based on the voltage command value and an offset value corresponding to the voltage command value, where i>1 and j>i.
Public/Granted literature
- US20220158408A1 LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2022-05-19
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