Invention Grant
- Patent Title: Plasma treatment apparatus for producing coatings
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Application No.: US16854498Application Date: 2020-04-21
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Publication No.: US11697132B2Publication Date: 2023-07-11
- Inventor: Matthias Bicker , Manfred Lohmeyer , Hartmut Bauch
- Applicant: Schott AG
- Applicant Address: DE Mainz
- Assignee: SCHOTT AG
- Current Assignee: SCHOTT AG
- Current Assignee Address: DE Mainz
- Agency: Ruggiero McAllister & McMahon LLC
- Priority: DE 2011009057.6 2011.01.20
- The original application number of the division: US13980729
- Main IPC: B05D3/14
- IPC: B05D3/14 ; C03C17/28 ; H01J37/32 ; B05D1/00 ; B05D7/22 ; C03C17/00 ; A61M5/31
Abstract:
An apparatus and to a method for treating layers using a plasma zone sealed from the outer atmospheric pressure are provided. The apparatus and method include a plasma reactor including a substrate carrier in form of a container receiving means, and a closing element that is joined with the substrate carrier by means of a lifting device.
Public/Granted literature
- US20200246827A1 PLASMA TREATMENT APPARATUS FOR PRODUCING COATINGS Public/Granted day:2020-08-06
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