Invention Grant
- Patent Title: Method and device for operating a liquid metal-ion source or liquid metal electron source as well as a liquid metal-ion source or liquid metal electron source
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Application No.: US17339937Application Date: 2021-06-04
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Publication No.: US11705299B2Publication Date: 2023-07-18
- Inventor: Martin Tajmar
- Applicant: Technische Universität Dresden
- Applicant Address: DE Dresden
- Assignee: TECHNISCHE UNIVERSITÄT DRESDEN
- Current Assignee: TECHNISCHE UNIVERSITÄT DRESDEN
- Current Assignee Address: DE Dresden
- Agency: Cook Alex Ltd.
- Priority: DE 2020114999.9 2020.06.05
- Main IPC: H01J1/02
- IPC: H01J1/02 ; H01J7/44 ; B64G1/40 ; H01J27/02 ; H01J27/22 ; H01J27/26
Abstract:
The invention relates to a liquid metal-ion beam system (1) or liquid metal electron beam system, including:
a conductive emitter electrode (2),
a conductive extractor electrode (3) opposite to the emitter electrode (2),
a liquid metal reservoir (4) which is fluidically connected to the emitter electrode (2) for transporting liquid metal to the emitter electrode (2),
a control unit (5) which is configured to apply a periodically varying operating voltage between emitter electrode (2) and extractor electrode (3).
a conductive emitter electrode (2),
a conductive extractor electrode (3) opposite to the emitter electrode (2),
a liquid metal reservoir (4) which is fluidically connected to the emitter electrode (2) for transporting liquid metal to the emitter electrode (2),
a control unit (5) which is configured to apply a periodically varying operating voltage between emitter electrode (2) and extractor electrode (3).
Public/Granted literature
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