Invention Grant
- Patent Title: Methods and systems for adsorbing organometallic vapor
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Application No.: US16879514Application Date: 2020-05-20
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Publication No.: US11712653B2Publication Date: 2023-08-01
- Inventor: Charles H. Applegarth , Rocky D. Gipson , Sarah Vogt , Joshua T. Cook , Matthew Browning , Marco Holzner
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: B01D53/00
- IPC: B01D53/00 ; B01D53/04 ; B01J20/28 ; B01J20/20 ; B01J20/08 ; B01J20/10
Abstract:
Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.
Public/Granted literature
- US20200368669A1 METHODS AND SYSTEMS FOR ADSORBING ORGANOMETALLIC VAPOR Public/Granted day:2020-11-26
Information query
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