Invention Grant
- Patent Title: Method and system for measuring a surface of an object comprising different structures using low coherence interferometry
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Application No.: US17296117Application Date: 2019-11-28
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Publication No.: US11713960B2Publication Date: 2023-08-01
- Inventor: Jean-François Boulanger , Isabelle Bergoënd
- Applicant: UNITY SEMICONDUCTOR
- Applicant Address: FR Montbonnot-Saint-Martin
- Assignee: UNITY SEMICONDUCTOR
- Current Assignee: UNITY SEMICONDUCTOR
- Current Assignee Address: FR Montbonnot-Saint-Martin
- Agency: Greer, Burns & Crain, Ltd
- Priority: FR 72153 2018.11.30
- International Application: PCT/EP2019/082942 2019.11.28
- International Announcement: WO2020/109486A 2020.06.04
- Date entered country: 2021-05-21
- Main IPC: G01B9/0209
- IPC: G01B9/0209 ; G01B9/02 ; G01B11/06

Abstract:
A method for measuring a surface of an object including at least one structure using low coherence optical interferometry, the method including the steps of acquiring an interferometric signal at a plurality of measurement points in a field of view and, for at least one measurement point, attributing the interferometric signal acquired to a class of interferometric signals from a plurality of classes, each of the classes being associated with a reference interferometric signal representative of a typical structure; and analysing the interferometric signal to derive therefrom an item of information on the structure at the measurement point, as a function of its class.
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