公开(公告)号：US11713960B2

公开(公告)日：2023-08-01

申请号：US17296117

申请日：2019-11-28

Applicant: UNITY SEMICONDUCTOR

Inventor： Jean-François Boulanger ,  Isabelle Bergoënd

IPC: G01B9/0209 ,  G01B9/02 ,  G01B11/06

CPC classification number: G01B9/0209 ,  G01B9/02083 ,  G01B9/02088 ,  G01B11/0625 ,  G01B2210/56

Abstract: A method for measuring a surface of an object including at least one structure using low coherence optical interferometry, the method including the steps of acquiring an interferometric signal at a plurality of measurement points in a field of view and, for at least one measurement point, attributing the interferometric signal acquired to a class of interferometric signals from a plurality of classes, each of the classes being associated with a reference interferometric signal representative of a typical structure; and analysing the interferometric signal to derive therefrom an item of information on the structure at the measurement point, as a function of its class.

公开(公告)号：US11906302B2

公开(公告)日：2024-02-20

申请号：US18302151

申请日：2023-04-18

Applicant: UNITY SEMICONDUCTOR

Inventor： Jean-François Boulanger ,  Isabelle Bergoënd

IPC: G01B9/0209 ,  G01B9/02 ,  G01B11/06

CPC classification number: G01B9/0209 ,  G01B9/02083 ,  G01B9/02088 ,  G01B11/0625 ,  G01B2210/56

Abstract: A method and related system for measuring a surface of a substrate including at least one structure using low coherence optical interferometry, the method being implemented with a system having an interferometric device, a light source, an imaging sensor, and a processing module, the method including: - acquiring, with the imaging sensor, an interferometric signal formed by the interferometric device between a reference beam and a measurement beam reflected by the surface at a plurality of measurement points in a field of view; the following steps being carried out by the processing module: classifying, by a learning technique, the acquired interferometric signals according to a plurality of classes, each class being associated with a reference interferometric signal representative of a typical structure; and analysing the interferometric signals to derive information on the structure at the measurement points, as a function of the class of each interferometric signal.