Invention Grant
- Patent Title: X-ray imaging panel and method for fabricating the same
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Application No.: US17718711Application Date: 2022-04-12
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Publication No.: US11714203B2Publication Date: 2023-08-01
- Inventor: Makoto Nakazawa , Rikiya Takita , Fumiki Nakano
- Applicant: Sharp Display Technology Corporation
- Applicant Address: JP Kameyama
- Assignee: Sharp Display Technology Corporation
- Current Assignee: Sharp Display Technology Corporation
- Current Assignee Address: JP Kameyama
- Agency: ScienBiziP, P.C.
- Priority: JP 21072763 2021.04.22
- Main IPC: G01T1/24
- IPC: G01T1/24 ; H01L27/146

Abstract:
According to an aspect, an active matrix substrate of an X-ray imaging panel includes: an active matrix substrate having a pixel region including a plurality of pixels; and a scintillator that converts X-rays projected onto the X-ray imaging panel to scintillation light. The plurality of pixels include respective photoelectric conversion elements. The active matrix substrate further includes a first planarizing film that covers the photoelectric conversion elements, is formed from an organic resin film, and has a plurality of first contact holes and a first wiring line that is formed in the first contact holes and in a layer upper than the first planarizing film and connected to the photoelectric conversion elements within the first contact holes.
Public/Granted literature
- US20220342092A1 X-RAY IMAGING PANEL AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-10-27
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