Invention Grant
- Patent Title: Gas distribution system and reactor system including same
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Application No.: US15997445Application Date: 2018-06-04
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Publication No.: US11718913B2Publication Date: 2023-08-08
- Inventor: Sonti Sreeram , Junwei Su , Loc Vinh Tran
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01J37/32
Abstract:
A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas distribution system coupled to a reaction chamber.
Information query
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