Invention Grant
- Patent Title: Micromechanical component for a yaw rate sensor and corresponding production method
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Application No.: US17235363Application Date: 2021-04-20
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Publication No.: US11719539B2Publication Date: 2023-08-08
- Inventor: Matthias Kuehnel , Nils Felix Kuhlmann , Robert Maul , Rolf Scheben , Steffen Markisch , Thorsten Balslink , Wolfram Geiger
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE 2020205372.3 2020.04.28
- Main IPC: G01P3/44
- IPC: G01P3/44 ; G01C19/5712 ; G01C25/00 ; B81B3/00

Abstract:
A micromechanical component for a yaw rate sensor. The component includes a substrate having a substrate surface, a first rotor mass developed in one piece, which is able to be set into a first torsional vibration about a first axis of rotation aligned perpendicular to the substrate surface, and at least one first component of the micromechanical component. The first rotor mass is connected to the at least one first component via at least one first spring element. The at least one first spring element extends through a lateral concavity on the first rotor mass in each case and is connected to a recessed edge region of the first rotor mass. A yaw rate sensor and a production method for a micromechanical component for a yaw rate sensor, are also described.
Public/Granted literature
- US20210333103A1 MICROMECHANICAL COMPONENT FOR A YAW RATE SENSOR AND CORRESPONDING PRODUCTION METHOD Public/Granted day:2021-10-28
Information query
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