Invention Grant
- Patent Title: Transmission guided-mode resonant grating integrated spectroscopy device and method for manufacturing same
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Application No.: US16641300Application Date: 2018-08-16
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Publication No.: US11719575B2Publication Date: 2023-08-08
- Inventor: Yoshiaki Kanamori , Kazuhiro Hane , Daisuke Ema
- Applicant: TOHOKU UNIVERSITY
- Applicant Address: JP Sendai
- Assignee: TOHOKU UNIVERSITY
- Current Assignee: TOHOKU UNIVERSITY
- Current Assignee Address: JP Miyagi
- Agency: Sughrue Mion, PLLC
- Priority: JP 17161661 2017.08.24
- International Application: PCT/JP2018/030396 2018.08.16
- International Announcement: WO2019/039371A 2019.02.28
- Date entered country: 2020-02-24
- Main IPC: G01J3/18
- IPC: G01J3/18 ; G01J3/51 ; G02B6/12 ; G02B6/122 ; G02B6/124 ; G02B6/13 ; H01L27/144 ; H01L31/0216 ; H01L31/0232 ; H01L31/18

Abstract:
The present invention provides a transmission guided-mode resonant grating integrated spectroscopy device (transmission GMRG integrated spectroscopy device) characterized by comprising, disposed in this order on an optical detector array in which a plurality of diodes are mounted on a substrate made of a semiconductor: a transparent spacer layer; a waveguide layer; a transparent buffer layer provided as desired; a transmission metallic grating layer having a thickness causing surface plasmon; and a transparent protection film layer which is provided as desired.
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