公开(公告)号：US11719575B2

公开(公告)日：2023-08-08

申请号：US16641300

申请日：2018-08-16

Applicant: TOHOKU UNIVERSITY

Inventor： Yoshiaki Kanamori ,  Kazuhiro Hane ,  Daisuke Ema

IPC: G01J3/18 ,  G01J3/51 ,  G02B6/12 ,  G02B6/122 ,  G02B6/124 ,  G02B6/13 ,  H01L27/144 ,  H01L31/0216 ,  H01L31/0232 ,  H01L31/18

CPC classification number: G01J3/18 ,  G01J3/51 ,  G02B6/12004 ,  G02B6/124 ,  G02B6/1226 ,  G02B6/13 ,  H01L27/1446 ,  H01L31/02162 ,  H01L31/02327 ,  H01L31/18 ,  G02B2006/12107 ,  G02B2006/12123 ,  G02B2006/12138

Abstract: The present invention provides a transmission guided-mode resonant grating integrated spectroscopy device (transmission GMRG integrated spectroscopy device) characterized by comprising, disposed in this order on an optical detector array in which a plurality of diodes are mounted on a substrate made of a semiconductor: a transparent spacer layer; a waveguide layer; a transparent buffer layer provided as desired; a transmission metallic grating layer having a thickness causing surface plasmon; and a transparent protection film layer which is provided as desired.