Compensated alternating polarity capacitive structures
Abstract:
Embodiments are provided for a capacitive array including: a first row of alternating first fingers and second fingers formed in a first conductive layer, wherein each first and second finger has a uniform width in a first direction and a uniform length in a second direction perpendicular to the first direction, the first row of alternating first and second fingers include a same integer number of first fingers and second fingers, and the first and second fingers are interdigitated in the first direction; and a first compensation finger formed in the first conductive layer at an end of the first row of alternating first and second fingers nearest a first outer boundary of the capacitive array, the first compensation finger configured to have an opposite polarity as a neighboring finger on the end of the first row.
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