Invention Grant
- Patent Title: Compensated alternating polarity capacitive structures
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Application No.: US16941729Application Date: 2020-07-29
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Publication No.: US11728336B2Publication Date: 2023-08-15
- Inventor: Robert S. Jones, III , Xiankun Jin
- Applicant: NXP USA, Inc.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- The original application number of the division: US16181790 2018.11.06
- Main IPC: H01L27/08
- IPC: H01L27/08 ; H01L23/532 ; H01L23/522 ; H03M1/00 ; H01L49/02

Abstract:
Embodiments are provided for a capacitive array including: a first row of alternating first fingers and second fingers formed in a first conductive layer, wherein each first and second finger has a uniform width in a first direction and a uniform length in a second direction perpendicular to the first direction, the first row of alternating first and second fingers include a same integer number of first fingers and second fingers, and the first and second fingers are interdigitated in the first direction; and a first compensation finger formed in the first conductive layer at an end of the first row of alternating first and second fingers nearest a first outer boundary of the capacitive array, the first compensation finger configured to have an opposite polarity as a neighboring finger on the end of the first row.
Information query
IPC分类: