Multi-pixel spectral sensor
Abstract:
A multi-pixel spectroscopy sensor for spectral analysis of a sample under test including an array of pixel elements generating a dataset including a plurality of data values corresponding to the pixel elements upon illumination of the sample by a light source. Each of the pixel elements including a stack of layers including first and second reflective structures, a phase tuning element, a detector element, and contact elements. The sensor further includes a read-out circuit connected to each of the contact elements for simultaneous read-out of a plurality of photocurrents for generating and outputting the dataset for the spectral analysis of the sample under test. The phase tuning element of each of the pixel elements is configured for a different wavelength response of the light and each photodetector of the pixel elements is comprised of a semiconductor material.
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