公开(公告)号：US10732035B2

公开(公告)日：2020-08-04

申请号：US16068445

申请日：2017-01-06

Applicant: Technische Universiteit Eindhoven

Inventor： Andrea Fiore ,  Robertus Willebrordus van der Heijden ,  Leonardo Midolo ,  {hacek over (Z)}arko Zobenica ,  Tianran Liu

IPC: G01J3/42 ,  G01J3/02 ,  G01J3/26 ,  G01J3/12

Abstract: A double membrane microspectrometer is provided that includes a first membrane having a first and second doped semiconductor layers, and a first intrinsic layer is disposed between the first and second layers, where the first intrinsic layer includes an optically absorbing material, a first pattern of through holes are disposed perpendicular through the first membrane having lateral support arms, a second membrane having a third doped layer and a fourth layer is an intrinsic layer or a doped layer, where the second membrane includes a second pattern of through holes, where the first membrane is separated from the second membrane by an insulating bridge layer and is supported above the second membrane by lateral support arms, where an absorption spectrum of the absorbing material is dependent on the separation distance of the membranes, electrodes are disposed on the first layer, the second layer, and the third layer operate the separation.

公开(公告)号：US11747203B2

公开(公告)日：2023-09-05

申请号：US17436186

申请日：2020-01-28

Applicant: TECHNISCHE UNIVERSITEIT EINDHOVEN

Inventor： Andrea Fiore ,  Kaylee Doranne Hakkel ,  Tianran Liu ,  Francesco Pagliano ,  Maurangelo Petruzzella

IPC: G01J3/28 ,  G01J3/02

CPC classification number: G01J3/2823 ,  G01J3/021 ,  G01J2003/2806

Abstract: A multi-pixel spectroscopy sensor for spectral analysis of a sample under test including an array of pixel elements generating a dataset including a plurality of data values corresponding to the pixel elements upon illumination of the sample by a light source. Each of the pixel elements including a stack of layers including first and second reflective structures, a phase tuning element, a detector element, and contact elements. The sensor further includes a read-out circuit connected to each of the contact elements for simultaneous read-out of a plurality of photocurrents for generating and outputting the dataset for the spectral analysis of the sample under test. The phase tuning element of each of the pixel elements is configured for a different wavelength response of the light and each photodetector of the pixel elements is comprised of a semiconductor material.

公开(公告)号：US20190072428A1

公开(公告)日：2019-03-07

申请号：US16068445

申请日：2017-01-06

Applicant: Technische Universiteit Eindhoven

Inventor： Andrea Fiore ,  Robertus Willebrordus VAN DER HEIJDEN ,  Leonardo Midolo ,  Zarko Zobenica ,  Tianran Liu

IPC: G01J3/02 ,  G01J3/26 ,  G01J3/42

Abstract: A double membrane microspectrometer is provided that includes a first membrane having a first and second doped semiconductor layers, and a first intrinsic layer is disposed between the first and second layers, where the first intrinsic layer includes an optically absorbing material, a first pattern of through holes are disposed perpendicular through the first membrane having lateral support arms, a second membrane having a third doped layer and a fourth layer is an intrinsic layer or a doped layer, where the second membrane includes a second pattern of through holes, where the first membrane is separated from the second membrane by an insulating bridge layer and is supported above the second membrane by lateral support arms, where an absorption spectrum of the absorbing material is dependent on the separation distance of the membranes, electrodes are disposed on the first layer, the second layer, and the third layer operate the separation.