Invention Grant
- Patent Title: Capacitor-referenced temperature sensing
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Application No.: US17543052Application Date: 2021-12-06
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Publication No.: US11747216B1Publication Date: 2023-09-05
- Inventor: Michael H. Perrott , Shungneng Lee
- Applicant: SiTime Coporation
- Applicant Address: US CA Santa Clara
- Assignee: SiTime Corporation
- Current Assignee: SiTime Corporation
- Current Assignee Address: US CA Santa Clara
- The original application number of the division: US17083706 2020.10.29
- Main IPC: G01K7/22
- IPC: G01K7/22 ; G01K7/16 ; H03B5/04 ; H03B5/30 ; H03H9/02 ; H03L1/02 ; G01K7/34 ; G01K7/18 ; G01K7/12
Abstract:
The temperature-dependent resistance of a MEMS structure is compared with an effective resistance of a switched CMOS capacitive element to implement a high performance temperature sensor.
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